Bulletin of the American Physical Society
71st Annual Gaseous Electronics Conference
Volume 63, Number 10
Monday–Friday, November 5–9, 2018; Portland, Oregon
Session GT1: Poster Session I
3:30 PM,
Tuesday, November 6, 2018
Oregon Convention Center
Room: Exhibit Hall A1
Abstract ID: BAPS.2018.GEC.GT1.59
Abstract: GT1.00059 : Detection of fast neutral species by dissociative electron attachment*
Preview Abstract Abstract
Authors:
Nicholas Braithwaite
(The Open University)
Ade Ayilaran
(The Open University)
*Single Nanometer Manufacturing for beyond CMOS devices, Grant agreement no: 318804, EU
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2018.GEC.GT1.59
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