Bulletin of the American Physical Society
71st Annual Gaseous Electronics Conference
Volume 63, Number 10
Monday–Friday, November 5–9, 2018; Portland, Oregon
Session GT1: Poster Session I
3:30 PM,
Tuesday, November 6, 2018
Oregon Convention Center
Room: Exhibit Hall A1
Abstract ID: BAPS.2018.GEC.GT1.104
Abstract: GT1.00104 : Correlation between electron temperature and plasma power in inductively coupled plasma*
Preview Abstract Abstract
Authors:
Hyo-Chang Lee
(Korea Research Inst of Standards and Science (KRISS))
J. H. Kim
(Korea Research Inst of Standards and Science (KRISS))
D. J. Seong
(Korea Research Inst of Standards and Science (KRISS))
K. H. You
(Korea Research Inst of Standards and Science (KRISS))
ChaeHo Shin
(Korea Research Inst of Standards and Science (KRISS))
Deuk-Chul Kwon
(Plasma Technology Research Center, Nation Fusion Research Institute)
B. H. Seo
(Applied Physics, California Institute of Technology)
S. J. Oh
(Applied Physics, California Institute of Technology)
C.-W. Chung
(Department of Electrical Engineering, Hanyang University)
*This research was supported by R&D Convergence Program (1711062007, CAP-17–02-NFRI-01).
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2018.GEC.GT1.104
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