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BM3.00001: TUTORIAL SESSION (8:00AM-12:30PM): CHAIRED BY PETER BRUGGEMAN
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Monday, November 5, 2018
8:00AM - 9:00AM
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BM3.00002: Optical Diagnostics
Richard Miles
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Monday, November 5, 2018
9:00AM - 9:30AM
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BM3.00003: BREAK (9:00AM-9:30AM)
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Monday, November 5, 2018
9:30AM - 10:30AM
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BM3.00004: Mass spectrometry of reactive low-pressure and atmospheric plasmas
Jan Benedikt
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Monday, November 5, 2018
10:30AM - 11:30AM
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BM3.00005: In Situ Surface Diagnostics during Plasma-Material Interactions
Vincent M Donnelly
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Monday, November 5, 2018
11:30AM - 12:30PM
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BM3.00006: Electrical Probe Measurement
Nicholas Braithwaite
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Monday, November 5, 2018
12:30PM - 2:00PM
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BM3.00007: LUNCH BREAK (12:30PM-2:00PM)
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BM3.00008: ADVANCES IN DIAGNOSTICS SESSION (2:00PM-5:00PM): CHAIRED BY YUKINORI SAKIYAMA
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Monday, November 5, 2018
2:00PM - 2:30PM
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BM3.00009: In situ optical diagnostics to understand plasma-surface interactions during atomic layer processing of Si-based dielectrics
Sumit Agarwal
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Monday, November 5, 2018
2:30PM - 3:00PM
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BM3.00010: Electrical diagnostics of pulsed plasmas
Tom Huiskamp, Guus Pemen
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Monday, November 5, 2018
3:00PM - 3:30PM
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BM3.00011: Diagnostics of plasma-liquid interactions
K. Sasaki, N. Shirai
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Monday, November 5, 2018
3:30PM - 4:00PM
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BM3.00012: In Situ Approaches for Diagnostics of Nanoparticles in Plasmas
Shurik Yatom, Alexandros Gerakis, Alexander Khrabry, Junhwi Bak, Hunter Belanger, Michael Shneider, James Mitrani, Igor Kaganovich, Andrei Khodak, Brentley Stratton, Vlad Vekselman, Yevgeny Raitses
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Monday, November 5, 2018
4:00PM - 4:30PM
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BM3.00013: Coherent and incoherent Thomson scattering in low-temperature plasmas
Sedina Tsikata
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Monday, November 5, 2018
4:30PM - 5:00PM
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BM3.00014: THz Diagnostics for Electron Density Measurement
Uwe Czarnetzki
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