Tuesday, November 7, 2017
1:30PM - 1:45PM
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FT1.00001: Theoretical investigation of power balance and hysteresis of a miniature microwave ICP-plasmajet
Michael Klute, Horia-Eugen Porteanu, Wolfgang Heinrich, Peter Awakowicz, Ralf Peter Brinkmann
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Tuesday, November 7, 2017
1:45PM - 2:00PM
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FT1.00002: Experimental Investigation of pulsed inductively coupled Ar and Ar/N2 plasmas by a time-resolved Langmuir probe
Fei Gao, Yu-Ru Zhang, Yong-Xin Liu, You-Nian Wang
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Tuesday, November 7, 2017
2:00PM - 2:15PM
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FT1.00003: Fundamental Studies of Pulsed Processing Plasmas
Kristopher Ford, Joel Brandon, Kyung Sun Kim, Tyler List, Tianyu Ma, Priyanka Arora, Shuo Huang, Sang Ki Nam, Steven Shannon, Vincent Donnelly, Mark Kushner
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Tuesday, November 7, 2017
2:15PM - 2:30PM
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FT1.00004: Model Describing The E-H Mode Transition With Intrinsic Electrical Properties Of Inductively Coupled Plasma Reactors
Shaun Smith, David J. Coumou
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Tuesday, November 7, 2017
2:30PM - 2:45PM
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FT1.00005: E-H mode detection and symmetry effects in ICP plasmas with bias power
Michael Klick
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Tuesday, November 7, 2017
2:45PM - 3:00PM
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FT1.00006: Effects of electron energy probability function on the negative ion production in low pressure inductively coupled hydrogen plasmas.
Wei Yang, Hong Li, Fei Gao, Alexander Khrabrov, Igor Kaganovich, You-Nian Wang
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Tuesday, November 7, 2017
3:00PM - 3:15PM
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FT1.00007: Circuit induced pulsed RF transients: impact on plasma parameters and source design considerations
Joel Brandon, Kris Ford, Sang-Ki Nam, Jang-Gyoo Yang, Sangheon Lee, Steve Shannon
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Tuesday, November 7, 2017
3:15PM - 3:30PM
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FT1.00008: A novel linear microwave plasma source using circular TE$_{\mathrm{11}}$ mode and continuous line slot antenna
Ju-Hong Cha, Ho-Jun Lee
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Tuesday, November 7, 2017
1:30PM - 1:45PM
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FT2.00001: Modeling wall ion fluxes in an RF discharge: insights from 2D PIC simulation
Romain Lucken, Trevor Lafleur, Vivien Croes, Antoine Tavant, Anne Bourdon, Pascal Chabert
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Tuesday, November 7, 2017
1:45PM - 2:00PM
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FT2.00002: Student Excellence Award Finalist: 3D ion and neutral distribution measurements and simulations of the boundary region of a magnetized plasma
Derek S. Thompson, Shane Keniley, Rinat Khaziev, Davide Curreli, M. Umair Siddiqui, Miguel F. Henriquez, David D. Caron, Andrew J. Jemiolo, Jacob W. McLaughlin, MIkal T. Dufor, Luke A. Neal, Earl E. Scime
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Tuesday, November 7, 2017
2:00PM - 2:30PM
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FT2.00003: Hot Cathode Current Mode Transitions
Invited Speaker:
Michael Campanell
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Tuesday, November 7, 2017
2:30PM - 2:45PM
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FT2.00004: Charge-exchange ions in a weakly collisional sheath
Uwe Czarnetzki, Tsanko Tsankov
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Tuesday, November 7, 2017
2:45PM - 3:00PM
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FT2.00005: Transition in sheath structure near emissive grooved surface in discharge plasma controlled by electron beam.
Irina Schweigert, T. S. Burton, G. B. Thompson, S. Langendorf, M. L. R. Walker, M. Keidar
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Tuesday, November 7, 2017
3:00PM - 3:15PM
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FT2.00006: Stability of the plasma sheath in the presence of secondary electrons emission
Roberto Martorelli, Vivien Croes, Romain Lucken, Antoine Tavant, Trevor Lafleur, Anne Bourdon, Pascal Chabert
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Tuesday, November 7, 2017
3:15PM - 3:30PM
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FT2.00007: Spatiotemporal analysis of the electric field reversals in capacitively coupled SiH$_{\mathrm{4}}$/Ar RF discharge
Wang Xi-Feng, Jia Wen-Zhu, Song Yuan-Hong, Dai Zhong-ling, Wang You-Nian
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