70th Annual Gaseous Electronics Conference
Volume 62, Number 10
Monday–Friday, November 6–10, 2017;
Pittsburgh, Pennsylvania
Session Index
Session ET1: Plasmas in Liquids I
Chair: David Go, University of Notre Dame
Room: Salon D
Tuesday, November 7, 2017
10:00AM - 10:30AM
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ET1.00001: Solvated electrons and plasma -- liquid chemistry in plasma exposed microdroplets
Invited Speaker:
Paul Maguire
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Tuesday, November 7, 2017
10:30AM - 10:45AM
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ET1.00002: A novel wire-to-cylinder plasma-water-setup for environmental applications
Katharina Stapelmann, Carolin Ratering
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Tuesday, November 7, 2017
10:45AM - 11:00AM
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ET1.00003: Studies of discharges in high conductivity liquids using fast imaging and simulations.
Leonidas Asimakoulas, Mohammad Karim, Tom Field, Bill Graham
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Tuesday, November 7, 2017
11:00AM - 11:15AM
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ET1.00004: Investigation of droplet generation induced by atmospheric pressure glow discharge in contact with liquid
Naoki Shirai, Goju Suga, Shusuke Nishiyama, Koichi Sasaki
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Tuesday, November 7, 2017
11:15AM - 11:30AM
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ET1.00005: DC driven low pressure glow discharge in high water vapor content: A characterization study.
Malik Tahiyat, Tanvir Farouk
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Tuesday, November 7, 2017
11:30AM - 11:45AM
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ET1.00006: A Multiphase Computational Model for Non-Equilibrium Plasma Discharge in Gas Bubbles Immersed in Liquid
Ashish Sharma, Dmitry Levko, Laxminarayan Raja
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Tuesday, November 7, 2017
11:45AM - 12:00PM
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ET1.00007: Kinetic and graph-theoretic approaches to model plasmas in liquids
Tomoyuki Murakami, Thomas J Morgan, Lutz Huwel, William G Graham
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Session ET2: Modeling and Simulation I
Chair: Jannis Teunissen, University of Leuven - KU Leuven
Room: Duquesne
Tuesday, November 7, 2017
10:00AM - 10:15AM
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ET2.00001: PIC-DSMC Model For Breakdown In Voids
Laura Biedermann, Chris Moore, Christian Turner
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Tuesday, November 7, 2017
10:15AM - 10:30AM
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ET2.00002: Student Excellence Award Finalist: Gas Breakdown: Across Length Scales and Frequency
Amanda Loveless, Adam Darr, Allen Garner
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Tuesday, November 7, 2017
10:30AM - 11:00AM
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ET2.00003: Modeling and Simulation of Lightning Related Transient Luminous Events at High Altitude in the Earth's Atmosphere
Invited Speaker:
Victor Pasko
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Tuesday, November 7, 2017
11:00AM - 11:15AM
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ET2.00004: Striation Characteristics in Radio-Frequency Capacitively Coupled Discharges under Different Conditions
Kallol Bera, Shahid Rauf, John Forster, Ken Collins
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Tuesday, November 7, 2017
11:15AM - 11:30AM
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ET2.00005: Student Excellence Award Finalist: Differences between Cartesian and spherical 1d3v Particle-In-Cell simulations
Sebastian Wilczek, Jan Trieschmann, Julian Schulze, Ralf Peter Brinkmann, Zoltan Donko, Thomas Mussenbrock
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Tuesday, November 7, 2017
11:30AM - 11:45AM
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ET2.00006: Electric field rebound of He plasma jets with positive and negative polarities on metal and dielectric targets
Pedro Viegas, Adam Obrusnik, Zdenek Bonaventura, Anne Bourdon
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Tuesday, November 7, 2017
11:45AM - 12:00PM
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ET2.00007: Kinetic, Unstructured Finite Element PIC-DSMC Simulation of Ultra-Fast Pin-to-Plane Discharge in Air
Christopher Moore, Andrew Fierro, Jean-Michel Pouvesle, Eric Robert, Anne Bourdon, Roy Jorgenson, Ashish Jindal, Matthew Hopkins
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Session ET3: Plasma Etching for Semiconductor Processing
Chair: SangHeon Song, Lam Research
Room: Oakmont Junior Ballroom
Tuesday, November 7, 2017
10:00AM - 10:30AM
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ET3.00001: Etching for New Devices
Invited Speaker:
Keizo Kinoshita
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Tuesday, November 7, 2017
10:30AM - 10:45AM
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ET3.00002: Cryogenic etching: A solution for damage-free narrow trench etching
Quanzhi Zhang, Stefan Tinck, Annemie Bogaerts
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Tuesday, November 7, 2017
10:45AM - 11:00AM
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ET3.00003: Machine Learning of Micro/macro Cavity Data for Etching Recipe Optimization
Hyakka Nakada, Masaru Kurihara, Masayoshi Ishikawa, Tatehito Usui, Naoyuki Kofuji, Takeshi Ohmori
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Tuesday, November 7, 2017
11:00AM - 11:30AM
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ET3.00004: Atomic Layer Etch: A Concurrent Plasma Modeling and Process Approach
Invited Speaker:
Mingmei Wang
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Tuesday, November 7, 2017
11:30AM - 11:45AM
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ET3.00005: Selective Etching by Tailored RF Ion Energy Control Using Frequency/Phase Locked RF Power Delivery
Yusuke Yoshida, David Coumou, Scott White, Steven Shannon, Sergey Voronin, Alok Ranjan
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Tuesday, November 7, 2017
11:45AM - 12:00PM
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ET3.00006: VUV Broad-Band absorption spectroscopy in downstream plasma soft-etch reactor
Robert Soriano Casero, Laurent Vallier, Gilles Cunge, Nader Sadeghi
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