Bulletin of the American Physical Society

70th Annual Gaseous Electronics Conference

Volume 62, Number 10

Monday–Friday, November 6–10, 2017; Pittsburgh, Pennsylvania

Session Index

Session BM1: Practical Challenges for Industry

Chair: Douglas Keil, LAM
Room: Salon D

Monday, November 6, 2017 2:00PM - 2:30PM		BM1.00001: Use of plasma sensors combined with artificial intelligence in the diagnostics and monitoring of plasma processes. Michael Hopkins, Cliodhna Harrison, Paul Scullin, David Gahan Preview Abstract
Monday, November 6, 2017 2:30PM - 3:00PM		BM1.00002: The significance of RF power delivery for thin-film semiconductor plasma processes and the enhancements of innovative solutions David J. Coumou Preview Abstract
Monday, November 6, 2017 3:00PM - 3:30PM		BM1.00003: Plasma etch reactor design challenges for high RF power applications Alexei Marakhtanov Preview Abstract
Monday, November 6, 2017 3:30PM - 4:00PM		BM1.00004: Atomic Layer Processing of Silicon Dielectrics: Precursors, Processes, and Plasmas David C. Smith Preview Abstract
Monday, November 6, 2017 4:00PM - 4:30PM		BM1.00005: Advanced HIPIMS solution for R&D and Process Development Sean Armstrong Preview Abstract
Monday, November 6, 2017 4:30PM - 5:00PM		BM1.00006: Practical challenges for the integration and application of plasmas in atomic layer deposition systems J. R. Gaines Preview Abstract

Session BM2: Linking Theory & Experiment

Chair: Thomas Mussenbrock, Brandenburg University of Technology
Room: Duquesne

Monday, November 6, 2017 2:00PM - 2:30PM		BM2.00001: Modeling of industrial plasma tools and applications: experimental validation Shahid Rauf, Samaneh Sadighi, Ajit Balakrishna, Kallol Bera, Jason Kenney, Wei Tian, Jun-Chieh Wang Preview Abstract
Monday, November 6, 2017 2:30PM - 3:00PM		BM2.00002: Validation of computation by Experiment for the VSim and USim Codes John Cary, SN Averkin, KRC Beckwith, BM Cowan, TG Jenkins, SE Kruger, M Kundrapu, C Roark, SW Sides, GR Werner Preview Abstract
Monday, November 6, 2017 3:00PM - 3:30PM		BM2.00003: Combining advanced optical diagnostics and simulations to reveal chemical kinetics in atmospheric pressure plasmas Sandra Schroeter, J. Bredin, A. R. Gibson, A. West, A. Wijaikhum, K. Niemi, H. Davies, N. Minesi, J. Dedrick, M. Foucher, J. P. Booth, N. de Oliveira, D. Joyeux, L. Nahon, Y. Gorbanev, V. Chechik, E. Wagenaars, T. Gans, D. O'Connell Preview Abstract
Monday, November 6, 2017 3:30PM - 4:00PM		BM2.00004: Linking experimental measurements and numerical simulations to understand plasma-surface interaction processes A. R. Gibson, M. Blake, J. Bredin, K. Niemi, A. Greb, B. Bruneau, E. Johnson, A. Derzsi, Z. Donko, J.-P. Booth, D. O'Connell, T. Gans Preview Abstract
Monday, November 6, 2017 4:00PM - 4:30PM		BM2.00005: The effects of elementary surface processes on the plasma parameters in capacitively coupled radiofrequency discharges Aranka Derzsi, Benedek Horvath, Manaswi Daksha, Birk Berger, Sebastian Wilczek, Jan Trieschmann, Thomas Mussenbrock, Peter Awakowicz, Zoltan Donko, Julian Schulze Preview Abstract
Monday, November 6, 2017 4:30PM - 5:00PM		BM2.00006: Sputtering process data interpreted by heavy particle simulations Jan Trieschmann, Stefan Ries, Nikita Bibinov, Peter Awakowicz, Stanislav Mraz, Jochen M. Schneider, Thomas Mussenbrock Preview Abstract

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Bulletin of the American Physical Society

70th Annual Gaseous Electronics Conference

Volume 62, Number 10

Monday–Friday, November 6–10, 2017; Pittsburgh, Pennsylvania

Session Index

Session BM1: Practical Challenges for Industry

Session BM2: Linking Theory & Experiment

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