Bulletin of the American Physical Society
70th Annual Gaseous Electronics Conference
Volume 62, Number 10
Monday–Friday, November 6–10, 2017; Pittsburgh, Pennsylvania
Session VF3: Surface Treatment and Deposition |
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Chair: Eva Kovacevic, Universite d'Orleans Room: Oakmont Junior Ballroom |
Friday, November 10, 2017 8:00AM - 8:15AM |
VF3.00001: Improvement of thin films by plasma assisted deposition Edmund Schuengel, Silvio Gees, Silvia Schwyn-Thoeny The quality of thin films deposited in sputter processes is improved by using an additional plasma treatment. Here, the role of an additional capacitively coupled radio frequency plasma with a single grid confinement is investigated. We focus on the scenario of the sputter plasma and the plasma source being active at the same time in the same vacuum environment, with a substrate repeatedly being exposed to either one of them. Depending on the conditions, the additional treatment by the plasma source may affect the deposition process physically by generating energetic ions, which bombard the surface, and chemically by generating reactive species such as atomic oxygen. A significant interaction between the dc or dcrf sputter plasma, where the reactive gas flow is actively controlled, and the auxiliary rf plasma is observed. These effects are examined by voltage and ion energy measurements as well as by optical emission spectroscopy. Furthermore, the benefits in film structure, surface roughness, and optical properties due to physical and chemical mechanisms in plasma assisted processes are highlighted. [Preview Abstract] |
Friday, November 10, 2017 8:15AM - 8:30AM |
VF3.00002: Dielectric barrier discharges prevent cracking in hard latex dispersion coatings Sebastian Dahle, Thomas Waters, Wolfgang Maus-Friedrichs The deposition of coatings from latex dispersions is commonly used in various industrial and commercial fields. Most of these paints use acrylate or methacrylate copolymers, since these are well resistant against weathering, UV and many chemicals. However, the hardest copolymers, which offer the highest abrasion resistances and mechanical stabilities, suffer from a cracking that is hard to prevent. Many elaborate approaches try to circumvent this behavior, which is known as the film formation dilemma. By applying a dielectric barrier discharge, in air, on to the wet film for short periods of time, we were able to prevent the latex film from cracking. Even though the physical effects of the plasma treatment, such as an increased drying rate and a slight temperature increase, did influence the film formation, the observed effect appears to be mostly caused by chemical changes in the surface layer. [Preview Abstract] |
Friday, November 10, 2017 8:30AM - 8:45AM |
VF3.00003: Plasma based synthesis of conductive polymer nanostructures: from nanoparticles to thin films Johannes Berndt, Cedric Pattyn, Ana Dias, Eva Kovacevic This contribution deals with polymerization processes in aniline containing low temperature plasmas. The work is focused on the synthesis of conductive polymers which are produced either as thin films (deposited on advanced nanocarbons like carbon nanotubes, carbon nanowalls and graphene) or as nanoparticles. The work will discuss some general strategies for the plasma based synthesis of conductive polymers (based on plasma and material diagnostics as for example in-situ FTIR, mass spectroscopy, etc) and will give as well some examples for applications. [Preview Abstract] |
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