Bulletin of the American Physical Society
70th Annual Gaseous Electronics Conference
Volume 62, Number 10
Monday–Friday, November 6–10, 2017; Pittsburgh, Pennsylvania
Session VF2: Gas Phase Plasma Chemistry II
8:00 AM–9:30 AM,
Friday, November 10, 2017
Room: Duquesne
Chair: David Staack, Texas A&M University
Abstract ID: BAPS.2017.GEC.VF2.2
Abstract: VF2.00002 : Efect of discharge tube temperature on the densities of ${\rm N}_2({\rm A}^3\Sigma_u^+)$ and atomic nitrogen in a remote nitrogen plasma source
8:15 AM–8:30 AM
Preview Abstract
Abstract
Authors:
Masaharu Shimabayashi
(Hokkaido Univ.)
Kazuaki Kurihara
(Toshiba/Imec)
Koichi Sasaki
(Hokkaido Univ.)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2017.GEC.VF2.2
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