70th Annual Gaseous Electronics Conference
Volume 62, Number 10
Monday–Friday, November 6–10, 2017;
Pittsburgh, Pennsylvania
Session Index
Session SR3: Capacitively Coupled Plasmas
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Chair: Rochan Upadhyay, Esgee Technologies Inc.
Room: Oakmont Junior Ballroom
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Thursday, November 9, 2017
1:30PM - 1:45PM
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SR3.00001: The effects of realistic heavy particle induced secondary electron emission coefficients on the electron power absorption dynamics in capacitively coupled plasmas
Julian Schulze, Manaswi Daksha, Aranka Derzsi, Sebastian Wilczek, Jan Trieschmann, Thomas Mussenbrock, Peter Awakowicz, Zoltan Donko
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Thursday, November 9, 2017
1:45PM - 2:00PM
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SR3.00002: Nonlinear electromagnetics model of an asymmetrically driven capacitive discharge
M.A. Lieberman, Emi Kawamura, A.J. Lichtenberg, De-Qi Wen
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Thursday, November 9, 2017
2:00PM - 2:15PM
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SR3.00003: Nonlinear interaction of capacitive discharges and power matching networks
Frederik Schmidt, Jan Trieschmann, Ralf Peter Brinkmann, Thomas Mussenbrock
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Thursday, November 9, 2017
2:15PM - 2:30PM
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SR3.00004: Customizing Capacitively Coupled Plasma Properties with Triple-Frequency Power Sources
Chenhui Qu, Peng Tian, Shuo Huang, Mark J. Kushner
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Thursday, November 9, 2017
2:30PM - 3:00PM
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SR3.00005: Tailoring charged particle distribution functions and chemical kinetics in non-thermal plasmas using multiple frequency excitation
Invited Speaker:
A. R. Gibson
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Thursday, November 9, 2017
3:00PM - 3:15PM
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SR3.00006: Investigation of Capacitively Coupled Plasma with electron beam by impedance analysis
Inshik Bae, Hongyoung Chang
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Thursday, November 9, 2017
3:15PM - 3:30PM
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SR3.00007: Experimental evidence of nonlinear standing wave effect excited by higher harmonics in very high frequency capacitive discharges
Kai Zhao, Yong-Xin Liu, You-Nian Wang
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