A zero dimensional model of microwave induced coaxial surface wave discharge fed with hexamethyldisiloxane/oxygen*

A zero-dimensional global model is developed to analyse a microwave induced coaxial discharge of examethyldisiloxane/oxygen. The wall flux is analytically estimated and the model is validated by comparing against a variety of measurements for a feeding gas of argon or oxygen. Ion wall flux significantly contributes to the net loss rate of the positive ions. A primary chemical kinetics is added to the oxygen study to investigate the characteristics of the plasma with admixture ratio of 50:100 (HMDSO/O$_2$). Even though the dominant background gas is oxygen, the simulations suggest that the highest positive ion concentration belongs to Si$_2$OC$_5$H$_{15}^{+}$ that is also confirmed by measurements. The simulation results are compared with existing measurements and an agreement is obtained.