Bulletin of the American Physical Society
70th Annual Gaseous Electronics Conference
Volume 62, Number 10
Monday–Friday, November 6–10, 2017; Pittsburgh, Pennsylvania
Session GT1: Poster Session I
4:00 PM,
Tuesday, November 7, 2017
Room: Salon ABC
Abstract ID: BAPS.2017.GEC.GT1.26
Abstract: GT1.00026 : Two-dimensional fluid simulation in a radio frequency capacitively coupled plasma sustained in SiH$_{\mathrm{4}}$/N$_{\mathrm{2}}$/O$_{\mathrm{2}}$*
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Abstract
Authors:
wenzhu jia
(Dalian University of Technology)
yuanhong song
(Dalian University of Technology)
younian wang
(Dalian University of Technology)
*This work was supported by the National Natural Science Foundation of China (Grant No. 11275038 and 11675036)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2017.GEC.GT1.26
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