Bulletin of the American Physical Society
70th Annual Gaseous Electronics Conference
Volume 62, Number 10
Monday–Friday, November 6–10, 2017; Pittsburgh, Pennsylvania
Session GT1: Poster Session I
4:00 PM,
Tuesday, November 7, 2017
Room: Salon ABC
Abstract ID: BAPS.2017.GEC.GT1.24
Abstract: GT1.00024 : On the influence of parasitic capacitances on the ion energy bombardment in a large-area multi-frequency CCP*
Preview Abstract
Abstract
Authors:
Stefan Ries
(AEPT, Ruhr University Bochum)
Julian Schulze
(AEPT, Ruhr University Bochum)
Peter Awakowicz
(AEPT, Ruhr University Bochum)
Collaboration:
AEPT
*The MFCCP is a sub-project of the collaborative research centre SFB-TR 87 funded by the German Research Foundation. We want to thank Douglas Keil from LAM Research for sharing his experiences with us.
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2017.GEC.GT1.24
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