Tuesday, November 7, 2017
1:30PM - 1:45PM
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FT1.00001: Theoretical investigation of power balance and hysteresis of a miniature microwave ICP-plasmajet
Michael Klute, Horia-Eugen Porteanu, Wolfgang Heinrich, Peter Awakowicz, Ralf Peter Brinkmann
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Tuesday, November 7, 2017
1:45PM - 2:00PM
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FT1.00002: Experimental Investigation of pulsed inductively coupled Ar and Ar/N2 plasmas by a time-resolved Langmuir probe
Fei Gao, Yu-Ru Zhang, Yong-Xin Liu, You-Nian Wang
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Tuesday, November 7, 2017
2:00PM - 2:15PM
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FT1.00003: Fundamental Studies of Pulsed Processing Plasmas
Kristopher Ford, Joel Brandon, Kyung Sun Kim, Tyler List, Tianyu Ma, Priyanka Arora, Shuo Huang, Sang Ki Nam, Steven Shannon, Vincent Donnelly, Mark Kushner
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Tuesday, November 7, 2017
2:15PM - 2:30PM
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FT1.00004: Model Describing The E-H Mode Transition With Intrinsic Electrical Properties Of Inductively Coupled Plasma Reactors
Shaun Smith, David J. Coumou
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Tuesday, November 7, 2017
2:30PM - 2:45PM
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FT1.00005: E-H mode detection and symmetry effects in ICP plasmas with bias power
Michael Klick
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Tuesday, November 7, 2017
2:45PM - 3:00PM
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FT1.00006: Effects of electron energy probability function on the negative ion production in low pressure inductively coupled hydrogen plasmas.
Wei Yang, Hong Li, Fei Gao, Alexander Khrabrov, Igor Kaganovich, You-Nian Wang
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Tuesday, November 7, 2017
3:00PM - 3:15PM
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FT1.00007: Circuit induced pulsed RF transients: impact on plasma parameters and source design considerations
Joel Brandon, Kris Ford, Sang-Ki Nam, Jang-Gyoo Yang, Sangheon Lee, Steve Shannon
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Tuesday, November 7, 2017
3:15PM - 3:30PM
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FT1.00008: A novel linear microwave plasma source using circular TE$_{\mathrm{11}}$ mode and continuous line slot antenna
Ju-Hong Cha, Ho-Jun Lee
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