Bulletin of the American Physical Society
69th Annual Gaseous Electronics Conference
Volume 61, Number 9
Monday–Friday, October 10–14, 2016; Bochum, Germany
Session TR2: Magnetrons II
4:00 PM–5:15 PM,
Thursday, October 13, 2016
Room: 2a
Chair: Jon Gudmundsson, University of Iceland
Abstract ID: BAPS.2016.GEC.TR2.5
Abstract: TR2.00005 : Reactive high power impulse magnetron sputtering: combining simulation and experiment
5:00 PM–5:15 PM
Preview Abstract
Abstract
Authors:
Tomas Kozak
(Department of Physics and NTIS - European Centre of Excellence, University of West Bohemia, Univerzitni 8, 306 14 Plzen, Czech Republic)
Jaroslav Vlcek
(Department of Physics and NTIS - European Centre of Excellence, University of West Bohemia, Univerzitni 8, 306 14 Plzen, Czech Republic)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2016.GEC.TR2.5
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