Bulletin of the American Physical Society
69th Annual Gaseous Electronics Conference
Volume 61, Number 9
Monday–Friday, October 10–14, 2016; Bochum, Germany
Session QR2: Plasma Surface Interaction
8:30 AM–10:30 AM,
Thursday, October 13, 2016
Room: 2a
Chair: Peter Ventzek, Tokyo Electron
Abstract ID: BAPS.2016.GEC.QR2.6
Abstract: QR2.00006 : Atomic Precision Plasma Processing -- Modeling Investigations
10:00 AM–10:30 AM
Preview Abstract
Abstract
Author:
Shahid Rauf
(Applied Materials, Inc., Santa Clara, California, USA)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2016.GEC.QR2.6
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