Bulletin of the American Physical Society
69th Annual Gaseous Electronics Conference
Volume 61, Number 9
Monday–Friday, October 10–14, 2016; Bochum, Germany
Session QR2: Plasma Surface Interaction
8:30 AM–10:30 AM,
Thursday, October 13, 2016
Room: 2a
Chair: Peter Ventzek, Tokyo Electron
Abstract ID: BAPS.2016.GEC.QR2.2
Abstract: QR2.00002 : Plasma Simulation in the Multiphysics Object Oriented Simulation Environment MOOSE.
9:00 AM–9:15 AM
Preview Abstract
Abstract
Authors:
Steven Shannon
(North Carolina State Univ)
Alex Lindsay
(University of Illinois)
David Graves
(University of California - Berkeley)
Casey Icenhour
(North Carolina State Univ)
David Peterson
(North Carolina State Univ)
scott White
(MKS Instruments RF Power Division)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2016.GEC.QR2.2
Follow Us |
Engage
Become an APS Member |
My APS
Renew Membership |
Information for |
About APSThe American Physical Society (APS) is a non-profit membership organization working to advance the knowledge of physics. |
© 2025 American Physical Society
| All rights reserved | Terms of Use
| Contact Us
Headquarters
1 Physics Ellipse, College Park, MD 20740-3844
(301) 209-3200
Editorial Office
100 Motor Pkwy, Suite 110, Hauppauge, NY 11788
(631) 591-4000
Office of Public Affairs
529 14th St NW, Suite 1050, Washington, D.C. 20045-2001
(202) 662-8700