Bulletin of the American Physical Society
69th Annual Gaseous Electronics Conference
Volume 61, Number 9
Monday–Friday, October 10–14, 2016; Bochum, Germany
Session MW6: Poster session II
5:30 PM,
Wednesday, October 12, 2016
Room: Foyer
Abstract ID: BAPS.2016.GEC.MW6.62
Abstract: MW6.00062 : Dual frequency diffuse dielectric barrier discharge in atmospheric-pressure air-like gas mixture for thin film deposition
Preview Abstract
Abstract
Authors:
Yaoge Liu
(FOM Institute DIFFER)
Serguei Starostin
(FUJIFILM Manufacturing Europe B.V.)
Stefan Welzel
(FOM Institute DIFFER)
M. C. M. van de Sanden
(FOM Institute DIFFER)
Hindrik de Vries
(FOM Institute DIFFER)
Collaborations:
FOM Institute-DIFFER, Eindhoven University of Technology, FUJIFILM Manufacturing Europe B.V.
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2016.GEC.MW6.62
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