Bulletin of the American Physical Society
69th Annual Gaseous Electronics Conference
Volume 61, Number 9
Monday–Friday, October 10–14, 2016; Bochum, Germany
Session MW6: Poster session II
5:30 PM,
Wednesday, October 12, 2016
Room: Foyer
Abstract ID: BAPS.2016.GEC.MW6.50
Abstract: MW6.00050 : The effect of realistic surface coefficients on the electron dynamics and process control in simulations of capacitive RF plasmas
Preview Abstract
Abstract
Authors:
Manaswi Daksha
(Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum)
Birk Berger
(Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum)
Julian Schulze
(Department of Physics, West Virginia University, Institute for Electrical Engineering, Ruhr-University Bochum)
Aranka Derzsi
(Hungarian Academy of Sciences)
Ihor Korolov
(Hungarian Academy of Sciences)
Zoltan Donko
(Hungarian Academy of Sciences)
Sebastian Wilczek
(Institute for Electrical Engineering, Ruhr-University Bochum)
Thomas Mussenbrock
(Institute for Electrical Engineering, Ruhr-University Bochum)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2016.GEC.MW6.50
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