Bulletin of the American Physical Society
69th Annual Gaseous Electronics Conference
Volume 61, Number 9
Monday–Friday, October 10–14, 2016; Bochum, Germany
Session MW6: Poster session II
5:30 PM,
Wednesday, October 12, 2016
Room: Foyer
Abstract ID: BAPS.2016.GEC.MW6.147
Abstract: MW6.00147 : An analytical model of multi-component single frequency capacitively coupled plasma and experimental validation*
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Abstract
Authors:
Partha Saikia
(Facultad Fisica, Pontificia Universidad Catolica de Chile, Ave. Vicuña Mackena 4860, Santiago 22, Chile)
Heman Bhuyan
(Facultad Fisica, Pontificia Universidad Catolica de Chile, Ave. Vicuña Mackena 4860, Santiago 22, Chile)
Mario Favre
(Facultad Fisica, Pontificia Universidad Catolica de Chile, Ave. Vicuña Mackena 4860, Santiago 22, Chile)
Edmund Wyndham
(Facultad Fisica, Pontificia Universidad Catolica de Chile, Ave. Vicuña Mackena 4860, Santiago 22, Chile)
Felipe Veloso
(Facultad Fisica, Pontificia Universidad Catolica de Chile, Ave. Vicuña Mackena 4860, Santiago 22, Chile)
*Authors acknowledge FONDECYT grant 3160179 and 1130228.
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2016.GEC.MW6.147
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