69th Annual Gaseous Electronics Conference
Volume 61, Number 9
Monday–Friday, October 10–14, 2016;
Bochum, Germany
Session Index
Session GT2: Capacitively Coupled Plasmas I
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Chair: Aranka Derzsi, Hungarian Academy of Sciences
Room: 2a
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Tuesday, October 11, 2016
4:00PM - 4:15PM
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GT2.00001: Influence of the normal modes on the plasma uniformity in large scale CCP reactors.
Denis Eremin, Ralf Peter Brinkmann, Thomas Mussenbrock, Barton Lane, Masaaki Matsukuma, Peter Ventzek
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Tuesday, October 11, 2016
4:15PM - 4:30PM
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GT2.00002: Striations in electronegative capacitively coupled radio frequency plasmas
Julian Schulze, Yong-Xin Liu, Edmund Schuengel, Ihor Korolov, You-Nian Wang, Zoltan Donko
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Tuesday, October 11, 2016
4:30PM - 4:45PM
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GT2.00003: Parametric investigations of striations in electronegative capacitively coupled radio-frequency plasmas
Yong-Xin Liu, Edmund Schungel, Ihor Korolov, Zoltan Donko, Julian Schulze, You-Nian Wang
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Tuesday, October 11, 2016
4:45PM - 5:00PM
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GT2.00004: Two Dimensional Particle-in-cell/Monte Carlo (PIC/MC) Simulation of Radio Frequency Capacitively Coupled Plasmas with a Dielectric Side Wall Boundary
Yue Liu, Jean-Paul Booth, Pascal Chabert
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Tuesday, October 11, 2016
5:00PM - 5:15PM
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GT2.00005: Virtual IED sensor at an rf-biased electrode in low-pressure plasma
Maria Bogdanova, Dmitry Lopaev, Sergey Zyryanov, Alexander Rakhimov
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Tuesday, October 11, 2016
5:15PM - 5:30PM
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GT2.00006: Precise measurements of neutral gas temperature using Fiber Bragg Grating sensor in Argon capacitively coupled plasmas
Daoman Han, Zigeng Liu, Yongxin Liu, Wei Peng, Younian Wang
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