69th Annual Gaseous Electronics Conference
Volume 61, Number 9
Monday–Friday, October 10–14, 2016;
Bochum, Germany
Session Index
Session FT4: Plasma Deposition I
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Chair: Hirotaka Toyoda, Nagoya University
Room: 3
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Tuesday, October 11, 2016
2:00PM - 2:15PM
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FT4.00001: Electrical and Structural Properties of Copper Thin Films Deposited by Novel RF Magnetized Plasma Sputtering with Gyratory Square-Shaped Arrangement by Bar Permanent Magnets
MD Amzad Hossain, Yasunori Ohtsu
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Tuesday, October 11, 2016
2:15PM - 2:30PM
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FT4.00002: Lateral epitaxial overgrowth of silicon thick films during nanocluster assisted mesoplasma CVD
Makoto Kambara, Tesuro Koyano, Yusuke Imamura, Toyonobu Yoshida
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Tuesday, October 11, 2016
2:30PM - 2:45PM
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FT4.00003: ABSTRACT WITHDRAWN
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Tuesday, October 11, 2016
2:45PM - 3:00PM
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FT4.00004: Dynamics of the formation and loss of boron atoms in a H$_2$/B$_2$H$_6$ microwave plasma
C. Y. Duluard, X. Aubert, N. Sadeghi, A. Gicquel
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Tuesday, October 11, 2016
3:00PM - 3:15PM
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FT4.00005: Coatings deposition from liquid HMDSO films via conversion in dielectric barrier discharges
Sebastian Dahle, Wolfgang Maus-Friedrichs
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Tuesday, October 11, 2016
3:15PM - 3:30PM
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FT4.00006: Atmospheric Pressure Low Temperature Plasma System for Additive Manufacturing
Matthew Burnette, David Staack
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Tuesday, October 11, 2016
3:30PM - 3:45PM
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FT4.00007: Opportunities offered by the interaction of plasma and droplets to elaborate nanostructured oxide materials
Mehrdad Nikravech, Abdelkader Rahmani
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