Bulletin of the American Physical Society
68th Annual Gaseous Electronics Conference/9th International Conference on Reactive Plasmas/33rd Symposium on Plasma Processing
Volume 60, Number 9
Monday–Friday, October 12–16, 2015; Honolulu, Hawaii
Session QR4: Modeling and Simulation III
3:30 PM–5:30 PM,
Thursday, October 15, 2015
Room: 303 AB
Chair: Igor Kaganovich, Princeton Plasma Physics Laboratory
Abstract ID: BAPS.2015.GEC.QR4.2
Abstract: QR4.00002 : Modeling and control of ion energy distribution functions at the electrodes of multi-frequency capacitively coupled plasmas
4:00 PM–4:15 PM
Preview Abstract
Abstract
Authors:
Edmund Sch\"ungel
(West Virginia University)
Zolt\'an Donk\'o
(Wigner Research Centre for Physics, Hungarian Academy of Sciences)
Ihor Korolov
(Wigner Research Centre for Physics, Hungarian Academy of Sciences)
Aranka Derzsi
(Wigner Research Centre for Physics, Hungarian Academy of Sciences)
Julian Schulze
(West Virginia University)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2015.GEC.QR4.2
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