Bulletin of the American Physical Society
68th Annual Gaseous Electronics Conference/9th International Conference on Reactive Plasmas/33rd Symposium on Plasma Processing
Volume 60, Number 9
Monday–Friday, October 12–16, 2015; Honolulu, Hawaii
Session MW1: Atomic and Molecular Scattering Data for Plasma and Related Applications Workshop II |
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Chair: Tom Kirchner, York University Room: 301 B |
Wednesday, October 14, 2015 8:00PM - 8:30PM |
MW1.00001: Atomic Data Quality and Needs for Collisional-Radiative Modeling Invited Speaker: Yuri Ralchenko Reliable calculation of plasma kinetic characteristics and emission and/or absorption spectra necessarily involves large sets of atomic data such as state energies, radiative and autoionization transition probabilities and collisional cross sections or rate coefficients. The quality and extension requirements for such data often depend on a particular problem as various plasmas may exhibit non-Maxwellian distributions, anisotropy effects, or be under strong fields that may modify atomic structure. We will present an overview of the recent efforts on analysis of data quality requirements and data needs for collisional-radiative modeling of diverse plasmas, from magnetic fusion to astrophysics to dense laser-produced plasmas. [Preview Abstract] |
Wednesday, October 14, 2015 8:30PM - 9:00PM |
MW1.00002: Charge exchange spectroscopy of multiply charged ions for the development of the EUV light source for the next generation photo lithography Invited Speaker: Hajime Tanuma As a candidate of an extreme ultra-violet (EUV) light source for a next generation lithography, laser produced plasmas (LPP) of Xe and Sn have been investigated intensively in this decade because these plasmas have a strong emission around 13.5 nm which had been determined as the wavelength for the EUV lithography. This emission was considered to be due to multiply charged Xe and Sn ions in hot plasmas. However, the detail atomic spectroscopic data of these multiply charged heavy ions had not been reported yet. To provide atomic data for the understanding and development of the LPP as the EUV light source, we have observed the EUV emission spectra from individual charge states of Xe and Sn ions by means of a charge exchange spectroscopy method. Multiply charged Xe$^{q+}$ (q=7-23) and Sn$^{q+}$ (q=5-21) ions were produced with a 14.25 GHz electron cyclotron resonance ion source, and a charge-selected ion beam was directed into a collision chamber, where the ion interact with a target gas of He and Xe. EUV emissions from the collision center were observed with a compact flat-field grazing-incident spectrometer equipped with a liquid nitrogen cooled CCD camera. In experiments using Xe ions, we have found only Xe XI has a strong UTA (unresolved transition array) around 13.5 nm. On the other hand, various charge states of Sn from VIII to XIV contribute to the 13.5 nm emission. Identification of the transition lines was carried out by calculations using the Hebrew university Livermore laboratory atomic physics code and the Cowan code. Most of the emissions in the EUV region are attributed to the 4p-4d and 4d-$n\ell$ ($n\ell$ = 4f, 5p, and 5f) transitions. However, the 4d-4f transitions have approximately constant differences of about 0.5 nm between the experimental and theoretical results. This can be explained by considering the strong configuration interactions in the n=4 subshells. Using the experimental transition wavelengths of multiply charged Sn ions, theoretical modeling of radiative properties of Sn plasmas and radiation hydrodynamics simulations had been performed for the optimization of the LPP EUV light source. [Preview Abstract] |
Wednesday, October 14, 2015 9:00PM - 9:30PM |
MW1.00003: Interactions of Deuterium Plasma with Lithiated and Boronized Surfaces in NSTX-U Invited Speaker: Predrag Krstic The main research goal of the presented research has been to understand the changes in surface composition and chemistry at the nanoscopic temporal and spatial scales for long pulse Plasma Facing Components (PFCs) and link these to the overall machine performance of the National Spherical Torus Experiment Upgrade (NSTX-U). A study is presented of the lithium surface science, with atomic spatial and temporal resolutions. The dynamic surface responds and evolves in a mixed material environments (D, Li, C, B, O, Mo, W) with impingement of plasma particles in the energy range below 100 eV. The results, obtained by quantum-classical molecular dynamics, include microstructure changes, erosion, surface chemistry, deuterium implantation and permeation. Main objectives of the research are i) a comparison of Li and B deposition on carbon, ii) the role of oxygen and other impurities e.g. boron, carbon in the lithium performance, and iii) how this performance will change when lithium is applied to a high-Z refractory metal substrate (Mo, W). In addition to predicting and understanding the phenomenology of the processes, we will show plasma induced erosion of PFCs, including chemical and physical sputtering yields at various temperatures (300-700K) as well as deuterium uptake/recycling. [Preview Abstract] |
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