Bulletin of the American Physical Society
68th Annual Gaseous Electronics Conference/9th International Conference on Reactive Plasmas/33rd Symposium on Plasma Processing
Volume 60, Number 9
Monday–Friday, October 12–16, 2015; Honolulu, Hawaii
Session LW1: Poster Session II (4:00pm - 6:00pm)
4:00 PM,
Wednesday, October 14, 2015
Room: Exhibit Hall III
Abstract ID: BAPS.2015.GEC.LW1.176
Abstract: LW1.00176 : Releasing of Sputtered Au Film by Dissolving Sacrificial Layer and Its Self-Standing on Perforated Substrate*
Preview Abstract
Abstract
Authors:
Yu Miyamoto
(Department of Electrical \& Electronic Information Engineering, Toyohashi University of Technology)
Yuma Fujii
(Department of Electrical \& Electronic Information Engineering, Toyohashi University of Technology)
Masafumi Yamano
(Department of Electrical \& Electronic Information Engineering, Toyohashi University of Technology)
Toru Harigai
(Department of Electrical \& Electronic Information Engineering, Toyohashi University of Technology)
Yoshiyuki Suda
(Department of Electrical \& Electronic Information Engineering, Toyohashi University of Technology)
Hirofumi Takikawa
(Department of Electrical \& Electronic Information Engineering, Toyohashi University of Technology)
Mamiko Nishiuchi
(Japan Atomic Energy Agency)
Hironao Sakaki
(Japan Atomic Energy Agency)
Kiminori Kondo
(Japan Atomic Energy Agency)
*This work was supported by JSPS KAKENHI Grant-in-Aid for Scientific Research and Toukai Foundation for Technology.
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2015.GEC.LW1.176
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