Bulletin of the American Physical Society
68th Annual Gaseous Electronics Conference/9th International Conference on Reactive Plasmas/33rd Symposium on Plasma Processing
Volume 60, Number 9
Monday–Friday, October 12–16, 2015; Honolulu, Hawaii
Session LW1: Poster Session II (4:00pm - 6:00pm)
4:00 PM,
Wednesday, October 14, 2015
Room: Exhibit Hall III
Abstract ID: BAPS.2015.GEC.LW1.114
Abstract: LW1.00114 : Adjustable, High Voltage Pulse Generator with Isolated Output for Plasma Processing*
Preview Abstract
Abstract
Authors:
Timothy Ziemba
(Eagle Harbor Technologies, Inc.)
Kenneth E. Miller
(Eagle Harbor Technologies, Inc.)
James Prager
(Eagle Harbor Technologies, Inc.)
Ilia Slobodov
(Eagle Harbor Technologies, Inc.)
*This work was supported in part by a DOE SBIR.
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2015.GEC.LW1.114
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