Bulletin of the American Physical Society
68th Annual Gaseous Electronics Conference/9th International Conference on Reactive Plasmas/33rd Symposium on Plasma Processing
Volume 60, Number 9
Monday–Friday, October 12–16, 2015; Honolulu, Hawaii
Session GT1: Poster Session I (4:00pm - 6:00 pm)
4:00 PM,
Tuesday, October 13, 2015
Room: Exhibit Hall III
Abstract ID: BAPS.2015.GEC.GT1.162
Abstract: GT1.00162 : Correlation between energy of depositing particles and mobility of ITO films in the Reactive Plasma Deposition with dc arc discharge
Preview Abstract
Abstract 
Authors:
Hisashi Kitami
(Sumitomo Heavy Industries, ltd.)
Kazuya Taki
(Sumitomo Heavy Industries, ltd.)
Toshiyuki Sakemi
(Sumitomo Heavy Industries, ltd.)
Yasushi Aoki
(Sumitomo Heavy Industries, ltd.)
Takanori Kato
(Sumitomo Heavy Industries, ltd.)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2015.GEC.GT1.162
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