Bulletin of the American Physical Society
68th Annual Gaseous Electronics Conference/9th International Conference on Reactive Plasmas/33rd Symposium on Plasma Processing
Volume 60, Number 9
Monday–Friday, October 12–16, 2015; Honolulu, Hawaii
Session FT2: Inductively Coupled Plasmas
1:30 PM–3:30 PM,
Tuesday, October 13, 2015
Room: 308 AB
Chair: Earl Scime, West Virginia University
Abstract ID: BAPS.2015.GEC.FT2.2
Abstract: FT2.00002 : 3D-PIC simulation of an inductively coupled ion source*
1:45 PM–2:00 PM
Preview Abstract Abstract
Authors:
Robert Henrich
(Justus-Liebig-University Giessen, Institut fuer Theoretische Physik)
Nina Sarah Muehlich
(Justus-Liebig-University Giessen, Institut fuer Theoretische Physik)
Michael Becker
(Justus-Liebig-University Giessen, Institut fuer Theoretische Physik)
Christian Heiliger
(Justus-Liebig-University Giessen, Institut fuer Theoretische Physik)
*This work has been supported by the ``Bundesministerium fuer Wirtschaft und Energie.'' Grant 50RS1507
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2015.GEC.FT2.2
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