Tuesday, October 13, 2015
10:00AM - 10:30AM
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ET2.00001: Gaining greater control and understanding of processing plasmas through Tailored Voltage Waveforms
Invited Speaker:
Erik Johnson
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Tuesday, October 13, 2015
10:30AM - 10:45AM
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ET2.00002: Control of electron heating and ion energy distributions in capacitive plasmas by voltage waveform tailoring based on a novel power supply and impedance matching
Birk Berger, James Franek, Steven Brandt, Martin Liese, Matthias Barthel, Edmund Schuengel, Mark Koepke, Julian Schulze
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Tuesday, October 13, 2015
10:45AM - 11:00AM
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ET2.00003: Control of electron heating dynamics and DC self bias in electronegative capacitive CF$_{4}$ plasmas by voltage waveform tailoring
Julian Schulze, Bastien Bruneau, Erik Johnson, Jean-Paul Booth, Trevor Lafleur, Ihor Korolov, Aranka Derzsi, Zoltan Donko, Steven Brandt, Edmund Schuengel, Arthur Greb, Deborah O'Connell, Timo Gans
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Tuesday, October 13, 2015
11:00AM - 11:15AM
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ET2.00004: Student Award Finalist: Comparison of the effect of sawtooth-like voltage waveforms on discharge dynamics of Ar, H$_{2}$, and CF$_{4}$ plasmas
Bastien Bruneau, E. Johnson, T. Gans, D. O'Connell, A. Greb, I. Korolov, A. Derzsi, Z. Donko, E. Schungel, S. Brandt, J. Schulze, P. Diomede, D.J. Economou, S. Longo, T. Lafleur, J.-P. Booth
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Tuesday, October 13, 2015
11:15AM - 11:30AM
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ET2.00005: Nonlinear standing wave excitation by series resonance-enhanced harmonics in low pressure capacitive discharges
M.A. Lieberman, A.J. Lichtenberg, Emi Kawamura, A.M. Marakhtanov
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Tuesday, October 13, 2015
11:30AM - 11:45AM
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ET2.00006: Non-Linear Electron Resonance Heating in CCRF Discharges: A Kinetic Interpretation
Sebastian Wilczek, Jan Trieschmann, Julian Schulze, Edmund Schuengel, Denis Eremin, Ralf Peter Brinkmann, Aranka Derzsi, Ihor Korolov, Peter Hartmann, Zolt\'an Donk\'o, Thomas Mussenbrock
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Tuesday, October 13, 2015
11:45AM - 12:00PM
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ET2.00007: Electron Heating Mode Transitions in Nitrogen (13.56 and 40.68) MHz RF-CCPs
Ummugul Erozbek Gungor, Sinan Kadri Bilikmen, Demiral Akbar
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Tuesday, October 13, 2015
12:00PM - 12:15PM
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ET2.00008: Electron Heating in Capacitively Coupled RF Discharges Investigated with the Smooth Step Model
Ralf Peter Brinkmann
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