Bulletin of the American Physical Society
68th Annual Gaseous Electronics Conference/9th International Conference on Reactive Plasmas/33rd Symposium on Plasma Processing
Volume 60, Number 9
Monday–Friday, October 12–16, 2015; Honolulu, Hawaii
Session KW3: Modeling and Simulation II
1:30 PM–3:45 PM,
Wednesday, October 14, 2015
Room: 305 AB
Chair: Christopher Moore, Sandia National Laboratories
Abstract ID: BAPS.2015.GEC.KW3.1
Abstract: KW3.00001 : Heavy particle transport in sputtering systems*
1:30 PM–2:00 PM
Preview Abstract
Abstract
Author:
Jan Trieschmann
(Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany)
*This work is supported by the German Research Foundation (DFG) in the frame of the Collaborative Research Centre TRR 87.
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2015.GEC.KW3.1
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