Bulletin of the American Physical Society
68th Annual Gaseous Electronics Conference/9th International Conference on Reactive Plasmas/33rd Symposium on Plasma Processing
Volume 60, Number 9
Monday–Friday, October 12–16, 2015; Honolulu, Hawaii
Session GT1: Poster Session I (4:00pm - 6:00 pm)
4:00 PM,
Tuesday, October 13, 2015
Room: Exhibit Hall III
Abstract ID: BAPS.2015.GEC.GT1.74
Abstract: GT1.00074 : Diagnostics of capacitively-coupled hydrocarbon plasmas for deposition of diamond-like carbon films using quadrupole mass spectrometry and Langmuir probe*
Preview Abstract Abstract
Authors:
Akinori Oda
(Faculty of Engineering, Chiba Institute of Technology)
Shun Fukai
(Graduate School of Engineering, Chiba Institute of Technology)
Hiroyuki Kousaka
(Graduate School of Engineering, Nagoya University)
Takayuki Ohta
(Faculty of Engineering, Meijo University)
*This work was partly supported by KAKENHI (No.26420247), and a ``Grant for Advanced Industrial Technology Development (No.11B06004d)'' in 2011 from the New Energy and Industrial Technology Development Organization (NEDO) of Japan.
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2015.GEC.GT1.74
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