67th Annual Gaseous Electronics Conference
Volume 59, Number 16
Sunday–Friday, November 2–7, 2014;
Raleigh, North Carolina
Session Index
Session SF1: Plasma Sources
Chair: Julian Schulze, West Virginia University
Room: State EF
Friday, November 7, 2014
8:30AM - 9:00AM
|
|
SF1.00001: EED$f$ and IED$f$ of the non-ambipolar e$^{-}$-beam plasma and their effects on etch
Invited Speaker:
Lee Chen
Preview Abstract |
Friday, November 7, 2014
9:00AM - 9:15AM
|
|
SF1.00002: ABSTRACT WITHDRAWN
Preview Abstract |
Friday, November 7, 2014
9:15AM - 9:30AM
|
|
SF1.00003: Prevention of ion flux inhomogeneities in large area capacitively coupled discharges via the Electrical Asymmetry Effect
Edmund Schuengel, Julian Schulze, Sebastian Mohr, Uwe Czarnetzki
Preview Abstract |
Friday, November 7, 2014
9:30AM - 9:45AM
|
|
SF1.00004: Transient response of pulsed multi-source RF CCP discharges
Theresa Kummerer, David Peterson, David Coumou, Steven Shannon
Preview Abstract |
Friday, November 7, 2014
9:45AM - 10:00AM
|
|
SF1.00005: Etching of photoresist with an atmospheric pressure plasma jet
Andrew West, Marc van der Schans, Cigang Xu, Timo Gans, Mike Cooke, Erik Wagenaars
Preview Abstract |
Friday, November 7, 2014
10:00AM - 10:15AM
|
|
SF1.00006: Development and characterization of a fast neutral beam source for damage-free etching
Mark Bowden, Daniil Marinov, Adetokunbo Ayilaran, Nicholas Braithwaite, Ziad el Otell
Preview Abstract |
Friday, November 7, 2014
10:15AM - 10:30AM
|
|
SF1.00007: Hysteresis in Radio-Frequency Inductively Coupled Plasmas
Hyo-Chang Lee, Chin-Wook Chung
Preview Abstract |
Session SF2: Thermal and Microwave Plasmas
Chair: Venkatt Ayyaswamy, University of California Merced
Room: State C
Friday, November 7, 2014
8:30AM - 8:45AM
|
|
SF2.00001: Experimental Characterization of Magnetogasdynamic Phenomena in Ultra-High Velocity Pulsed Plasma Jets
Keith Loebner, Benjamin Wang, Mark Cappelli
Preview Abstract |
Friday, November 7, 2014
8:45AM - 9:00AM
|
|
SF2.00002: Plasma diagnostics of non-equilibrium atmospheric plasma jets
Alexey Shashurin, David Scott, Michael Keidar, Mikhail Shneider
Preview Abstract |
Friday, November 7, 2014
9:00AM - 9:30AM
|
|
SF2.00003: Dynamic Contraction of the Positive Column of a Self-Sustained Glow Discharge in Molecular Gas Flow
Invited Speaker:
Mikhail Shneider
Preview Abstract |
Friday, November 7, 2014
9:30AM - 9:45AM
|
|
SF2.00004: Pulsed laser measurement of temperature and conductivity of a decaying arc channel
Patrick Stoller, Emmanouil Panousis, Jan Carstensen, Valeria Teppati
Preview Abstract |
Friday, November 7, 2014
9:45AM - 10:00AM
|
|
SF2.00005: Pseudo-continuous meter-scale microwave plasma production under atmospheric pressure
Hirotaka Toyoda, Haruka Suzuki, Suguru Nakano, Hitoshi Itoh, Makoto Sekine, Masaru Hori
Preview Abstract |
Friday, November 7, 2014
10:00AM - 10:15AM
|
|
SF2.00006: CO$_{2}$ dissociation in vortex-stabilised microwave plasmas
S. Welzel, W.A. Bongers, M.F. Graswinckel, M.C.M. van de Sanden
Preview Abstract |
Friday, November 7, 2014
10:15AM - 10:30AM
|
|
SF2.00007: Experimental observation of electron density bifurcation in plasma-metamaterial composites in microwave range
Osamu Sakai, Yoshihiro Nakamura, Akinori Iwai
Preview Abstract |
Session SF3: Electron Collisions with Atoms and Molecules
Chair: Allan Stauffer, York University
Room: State D
Friday, November 7, 2014
8:30AM - 9:00AM
|
|
SF3.00001: Angular distributions for ionization from excited states of atoms
Invited Speaker:
James Colgan
Preview Abstract |
Friday, November 7, 2014
9:00AM - 9:15AM
|
|
SF3.00002: Theoretical and experimental results for electron-impact ionization of the 3p state of Mg that has been laser aligned
Sadek Amami, Don Madison, Kate Nixon, Andrew Murray, James Colgan
Preview Abstract |
Friday, November 7, 2014
9:15AM - 9:30AM
|
|
SF3.00003: Quasi-Sturmian basis functions for two- and three-body scattering problems.
Jessica A. Del Punta, Lorenzo Ugo Ancarani, Gustavo Gasaneo
Preview Abstract |
Friday, November 7, 2014
9:30AM - 10:00AM
|
|
SF3.00004: Low energy electron-molecule scattering using the R-matrix method
Invited Speaker:
Jimena Gorfinkiel
Preview Abstract |
Friday, November 7, 2014
10:00AM - 10:15AM
|
|
SF3.00005: Theoretical and Experimental Triple Differential Cross Sections for Electron Impact Ionization of SF$_{6}$
Hari Chaluvadi, Kate Nixon, Andrew Murray, Chuangang Ning, James Colgan, Don Madison
Preview Abstract |
Friday, November 7, 2014
10:15AM - 10:30AM
|
|
SF3.00006: Importance of projectile-target interactions in the triple differential cross sections for Low energy (e,2e) ionization of aligned H$_{2}$
Esam Ali, Don Madison, X. Ren, A. Dorn, Chuangang Ning
Preview Abstract |