67th Annual Gaseous Electronics Conference
Volume 59, Number 16
Sunday–Friday, November 2–7, 2014;
Raleigh, North Carolina
Session Index
Session KW1: Plasma Diagnostics II
Chair: Hiroshi Akatsuka, Tokyo Institute of Technology
Room: State EF
Wednesday, November 5, 2014
1:30PM - 2:00PM
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KW1.00001: Diagnostics of plasma-surface interactions in plasma processes
Invited Speaker:
Kenji Ishikawa
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Wednesday, November 5, 2014
2:00PM - 2:15PM
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KW1.00002: Phase-modulated dispersion interferometry for electron-density determination of high-pressure plasma
Keiichiro Urabe, Tsuyoshi Akiyama, Kazuo Terashima
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Wednesday, November 5, 2014
2:15PM - 2:30PM
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KW1.00003: In-situ diagnostics and characterization of etch by-product deposition on chamber walls during halogen etching of silicon
Neema Rastgar, Saravanapriyan Sriraman, Ricky Marsh, Alex Paterson
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(Author Not Attending)
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KW1.00004: Accurate characterization of RF antennas for low-temperature plasma discharges with non-uniform magneto-static fields
Davide Melazzi, Vito Lancellotti, Alessandro Cardinali, Marco Manente, Daniele Pavarin
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Wednesday, November 5, 2014
2:45PM - 3:00PM
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KW1.00005: Electron Density Measurement of Argon Containing Plasmas by Saturation Spectroscopy
S. Nishiyama, H. Wang, S. Tomioka, K. Sasaki
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Wednesday, November 5, 2014
3:00PM - 3:15PM
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KW1.00006: OH(A,X) radicals in microwave plasma-assisted combustion of methane/air
Wei Wu, Che Fuh, Chuji Wang
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Wednesday, November 5, 2014
3:15PM - 3:30PM
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KW1.00007: Ion Flux and Energy Virtual Sensor for Measuring Ion Flux and Energy Distribution at a RF Biased Electrode in ICP Reactor (RIE-MODE)
Maria Bogdanova, Dmitriy Lopaev, Sergey Zyryanov
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Session KW2: Reactive Microdischarges
Chair: David Go, University of Notre Dame
Room: State C
Wednesday, November 5, 2014
1:30PM - 1:45PM
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KW2.00001: Influence of the amount of N$_2$ admixture on the dynamics of atmospheric pressure helium discharges in capillary tubes
Anne Bourdon, Francois Pechereau, Pedro Viegas
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Wednesday, November 5, 2014
1:45PM - 2:00PM
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KW2.00002: Production of Energetic Active-Oxygen Species at Atmospheric Pressure by Linear Microplasma Arrays
Wilson Rawlins, Kristin Galbally-Kinney, Steven Davis, Alan Hoskinson, Jeffrey Hopwood
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Wednesday, November 5, 2014
2:00PM - 2:15PM
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KW2.00003: High Frequency Self-pulsing Microplasmas
John Lassalle, William Pollard, David Staack
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Wednesday, November 5, 2014
2:15PM - 2:30PM
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KW2.00004: Conversion of carbon dioxide to carbon monoxide using non-thermal radio-frequency microplasmas at atmospheric pressure
James Dedrick, James Comerford, Zaenab Abd-Allah, Kari Niemi, Deborah O'Connell, Michael North, Timo Gans
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Wednesday, November 5, 2014
2:30PM - 2:45PM
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KW2.00005: Air-Plasma Bullets Propagating Inside Microcapillaries and in Ambient Air
Deanna A. Lacoste, Anne Bourdon, Koichi Kuribara, Keiichiro Urabe, Sven Stauss, Kazuo Terashima
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Wednesday, November 5, 2014
2:45PM - 3:00PM
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KW2.00006: High pressure micro glow discharge: Detailed approach to gas temperature modeling
Mostafa Mobli, Tanvir Farouk
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Session KW3: Electron-Molecule Collisions and Related Processes I
Chair: Leigh Hargreaves, California State University, Fullerton
Room: State D
Wednesday, November 5, 2014
1:30PM - 2:00PM
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KW3.00001: Electron attachment to fluorocarbon radicals
Invited Speaker:
Nicholas Shuman
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Wednesday, November 5, 2014
2:00PM - 2:15PM
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KW3.00002: H$_{2}$-Assisted Ternary Recombination of H$_{3}^{+}$ with Electrons at 300 K
Rainer Johnsen, Petr Dohnal, Peter Rubovic, Abel Kalosi, Michal Hejduk, Radek Plasil, Juraj Glosik
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Wednesday, November 5, 2014
2:15PM - 2:30PM
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KW3.00003: Kinetics of ion-ion mutual neutralization
Thomas M. Miller, Justin P. Wiens, Nicholas S. Shuman, Albert A. Viggiano
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Wednesday, November 5, 2014
2:30PM - 3:00PM
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KW3.00004: Electron scattering measurements from molecules of technological relevance
Invited Speaker:
Darryl Jones
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