Bulletin of the American Physical Society
67th Annual Gaseous Electronics Conference
Volume 59, Number 16
Sunday–Friday, November 2–7, 2014; Raleigh, North Carolina
Session NR2: Magnetically Enhanced Plasmas
10:00 AM–12:00 PM,
Thursday, November 6, 2014
Room: State C
Chair: Jon Gudmundsson, University of Iceland
Abstract ID: BAPS.2014.GEC.NR2.4
Abstract: NR2.00004 : Magnatron Deposition Systems
11:00 AM–11:30 AM
Preview Abstract
Abstract
Author:
John Forster
(Applied Materials)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2014.GEC.NR2.4
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