Bulletin of the American Physical Society
67th Annual Gaseous Electronics Conference
Volume 59, Number 16
Sunday–Friday, November 2–7, 2014; Raleigh, North Carolina
Session MW1: Poster Session II (17:30-19:30)
Wednesday, November 5, 2014
Room: Exhibit Hall
Abstract ID: BAPS.2014.GEC.MW1.63
Abstract: MW1.00063 : Cluster Incorporation Control by Hydrogen Silane Mixture in Multi Hollow Discharge Plasma CVD*
Preview Abstract Abstract
*Work supported by NEDO and PVTEC.
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2014.GEC.MW1.63
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