Bulletin of the American Physical Society
67th Annual Gaseous Electronics Conference
Volume 59, Number 16
Sunday–Friday, November 2–7, 2014; Raleigh, North Carolina
Session MW1: Poster Session II (17:30-19:30)
5:30 PM,
Wednesday, November 5, 2014
Room: Exhibit Hall
Abstract ID: BAPS.2014.GEC.MW1.31
Abstract: MW1.00031 : Simulation of Plasma Characteristics for Inductively Coupled Argon Plasma Using Dual-Frequency Antennas*
Preview Abstract
Abstract
Authors:
Xue-chun Li
(Dalian University of Technology)
Xiao-yan Sun
(Dalian University of Technology)
You-nian Wang
(Dalian University of Technology)
*This work was supported by the National Natural Science Foundation of China (No. 11175034, No. 11075029).
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2014.GEC.MW1.31
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