Bulletin of the American Physical Society
67th Annual Gaseous Electronics Conference
Volume 59, Number 16
Sunday–Friday, November 2–7, 2014; Raleigh, North Carolina
Session MW1: Poster Session II (17:30-19:30)
5:30 PM,
Wednesday, November 5, 2014
Room: Exhibit Hall
Abstract ID: BAPS.2014.GEC.MW1.26
Abstract: MW1.00026 : Control of ion energy distributions in capacitive RF discharges using customized voltage waveforms
Preview Abstract
Abstract
Authors:
Edmund Schuengel
(Department of Physics, West Virginia University, Morgantown, WV 26506)
Julian Schulze
(Department of Physics, West Virginia University, Morgantown, WV 26506)
Ihor Korolov
(Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary)
Aranka Derzsi
(Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary)
Zolt\'an Donk\'o
(Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2014.GEC.MW1.26
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