67th Annual Gaseous Electronics Conference
Volume 59, Number 16
Sunday–Friday, November 2–7, 2014;
Raleigh, North Carolina
Session Index
Session KW1: Plasma Diagnostics II
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Show Abstracts |
Chair: Hiroshi Akatsuka, Tokyo Institute of Technology
Room: State EF
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Wednesday, November 5, 2014
1:30PM - 2:00PM
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KW1.00001: Diagnostics of plasma-surface interactions in plasma processes
Invited Speaker:
Kenji Ishikawa
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Wednesday, November 5, 2014
2:00PM - 2:15PM
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KW1.00002: Phase-modulated dispersion interferometry for electron-density determination of high-pressure plasma
Keiichiro Urabe, Tsuyoshi Akiyama, Kazuo Terashima
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Wednesday, November 5, 2014
2:15PM - 2:30PM
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KW1.00003: In-situ diagnostics and characterization of etch by-product deposition on chamber walls during halogen etching of silicon
Neema Rastgar, Saravanapriyan Sriraman, Ricky Marsh, Alex Paterson
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(Author Not Attending)
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KW1.00004: Accurate characterization of RF antennas for low-temperature plasma discharges with non-uniform magneto-static fields
Davide Melazzi, Vito Lancellotti, Alessandro Cardinali, Marco Manente, Daniele Pavarin
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Wednesday, November 5, 2014
2:45PM - 3:00PM
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KW1.00005: Electron Density Measurement of Argon Containing Plasmas by Saturation Spectroscopy
S. Nishiyama, H. Wang, S. Tomioka, K. Sasaki
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Wednesday, November 5, 2014
3:00PM - 3:15PM
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KW1.00006: OH(A,X) radicals in microwave plasma-assisted combustion of methane/air
Wei Wu, Che Fuh, Chuji Wang
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Wednesday, November 5, 2014
3:15PM - 3:30PM
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KW1.00007: Ion Flux and Energy Virtual Sensor for Measuring Ion Flux and Energy Distribution at a RF Biased Electrode in ICP Reactor (RIE-MODE)
Maria Bogdanova, Dmitriy Lopaev, Sergey Zyryanov
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