Bulletin of the American Physical Society
67th Annual Gaseous Electronics Conference
Volume 59, Number 16
Sunday–Friday, November 2–7, 2014; Raleigh, North Carolina
Session HW2: Dusty Plasmas and Negative Ions
8:00 AM–9:30 AM,
Wednesday, November 5, 2014
Room: State C
Chair: Masaru Shiratani, Kyushu University
Abstract ID: BAPS.2014.GEC.HW2.5
Abstract: HW2.00005 : Numerical Modeling of a Pulsed Argon-Silane RF Plasma with Biased Substrate for High-Velocity Deposition of Nanoparticles*
9:00 AM–9:15 AM
Preview Abstract Abstract
Authors:
Steven Girshick
(Dept. of Mechanical Engineering, University of Minnesota, Minneapolis, MN)
Carlos Larriba-Andaluz
(Dept. of Mechanical Engineering, University of Minnesota, Minneapolis, MN)
*Partially supported by US Dept. of Energy Office of Fusion Energy Science (DE-SC0001939) and US National Science Foundation (CHE-124752).
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2014.GEC.HW2.5
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