Bulletin of the American Physical Society
67th Annual Gaseous Electronics Conference
Volume 59, Number 16
Sunday–Friday, November 2–7, 2014; Raleigh, North Carolina
Session GT1: Poster Session I (17:30-19:30)
5:30 PM,
Tuesday, November 4, 2014
Room: Exhibit Hall
Abstract ID: BAPS.2014.GEC.GT1.55
Abstract: GT1.00055 : Extended dielectric relaxation scheme for fluid transport simulations of high density plasma discharges*
Preview Abstract Abstract
Authors:
Deuk-Chul Kwon
(Natl Fusion Res Inst)
Mi-Young Song
(Natl Fusion Res Inst)
Jung-Sik Yoon
(Natl Fusion Res Inst)
*This work was supported by the Industrial Strategic Technology Development Program (10041637, Development of Dry Etch System for 10 nm class SADP Process) funded by the Ministry of Knowledge Economy (MKE, Korea).
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2014.GEC.GT1.55
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