Bulletin of the American Physical Society
67th Annual Gaseous Electronics Conference
Volume 59, Number 16
Sunday–Friday, November 2–7, 2014; Raleigh, North Carolina
Session GT1: Poster Session I (17:30-19:30)
5:30 PM,
Tuesday, November 4, 2014
Room: Exhibit Hall
Abstract ID: BAPS.2014.GEC.GT1.48
Abstract: GT1.00048 : Fast 2D Fluid-Analytical Simulation of IEDs and Plasma Uniformity in Multi-frequency CCPs*
Preview Abstract Abstract
Authors:
E. Kawamura
(Univ of California - Berkeley)
M.A. Lieberman
(Univ of California - Berkeley)
D.B. Graves
(Univ of California - Berkeley)
*This work was supported by the Department of Energy Office of Fusion Energy Science Contract DE-SC000193, and in part by gifts from Lam Research Corporation and Micron Corporation.
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2014.GEC.GT1.48
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