Bulletin of the American Physical Society
67th Annual Gaseous Electronics Conference
Volume 59, Number 16
Sunday–Friday, November 2–7, 2014; Raleigh, North Carolina
Session GT1: Poster Session I (17:30-19:30)
5:30 PM,
Tuesday, November 4, 2014
Room: Exhibit Hall
Abstract ID: BAPS.2014.GEC.GT1.45
Abstract: GT1.00045 : RF Models for Plasma-Surface Interactions in VSim*
Preview Abstract
Abstract
Authors:
Thomas G. Jenkins
(Tech-X Corporation)
D.N. Smithe
(Tech-X Corporation)
A.Y. Pankin
(Tech-X Corporation)
C.M. Roark
(Tech-X Corporation)
C.D. Zhou
(Tech-X Corporation)
P.H. Stoltz
(Tech-X Corporation)
S.E. Kruger
(Tech-X Corporation)
*Supported by US DoE SBIR-I/II Award DE-SC0009501.
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2014.GEC.GT1.45
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