67th Annual Gaseous Electronics Conference
Volume 59, Number 16
Sunday–Friday, November 2–7, 2014;
Raleigh, North Carolina
Session Index
Session FT2: Capacitive Discharges - Computational
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Chair: Uwe Czarnetzki, Ruhr-Universität Bochum
Room: State C
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Tuesday, November 4, 2014
3:30PM - 3:45PM
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FT2.00001: Tailoring plasma properties through the non-linear frequency coupling of odd harmonics
Andrew Gibson, Arthur Greb, William Graham, Timo Gans
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Tuesday, November 4, 2014
3:45PM - 4:00PM
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FT2.00002: Particle-in-cell Monte Carlo collision simulation of a capacitively coupled discharge in oxygen
Jon Tomas Gudmundsson, Michael A. Lieberman
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Tuesday, November 4, 2014
4:00PM - 4:15PM
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FT2.00003: Electron beam formation and resonance phenomena in low pressure capacitive rf plasmas
Sebastian Wilczek, Jan Trieschmann, Ralf Peter Brinkmann, Thomas Mussenbrock, Edmund Sch\"ungel, Julian Schulze, Aranka Derzsi, Ihor Korolov, Zolt\'an Donk\'o
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Tuesday, November 4, 2014
4:15PM - 4:30PM
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FT2.00004: Efficient Modelling of Pulsing CCP Reactors
Schabnam Naggary, Frank Atteln, Ralf Peter Brinkmann, Mustafa Megahed
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Tuesday, November 4, 2014
4:30PM - 5:00PM
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FT2.00005: Capacitively Coupled Plasma Modeling at Low and Moderately High Pressures
Invited Speaker:
Kallol Bera
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Tuesday, November 4, 2014
5:00PM - 5:15PM
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FT2.00006: The effect of ambipolar electric fields on the electron heating in capacitive RF plasmas
Julian Schulze, Zoltan Donko, Aranka Derzsi, Ihor Korolov, Edmund Schuengel
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Tuesday, November 4, 2014
5:15PM - 5:30PM
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FT2.00007: A Simplified Model of The Electrical Asymmetry Effect
Douglas L. Keil, Edward Augustyniak, Yukinori Sakiyama, Pavel Ni
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