66th Annual Gaseous Electronics Conference
Volume 58, Number 8
Monday–Friday, September 30–October 4 2013;
Princeton, New Jersey
Session Index
Session QR1: Microwave Discharges II
Chair: Alok Ranjan, TEL Technology Center America
Room: Ballroom I
Thursday, October 3, 2013
3:30PM - 3:45PM
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QR1.00001: Investigation of Microplasma Instabilities at 1 GHz
Chen Wu, Jeffrey Hopwood
Preview Abstract |
Thursday, October 3, 2013
3:45PM - 4:00PM
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QR1.00002: VUV Photon Fluxes from Microwave Excited Microplasmas at Low Pressure
Peng Tian, Mark Denning, Randall Urdhal, Mark J. Kushner
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Thursday, October 3, 2013
4:00PM - 4:15PM
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QR1.00003: Time-resolved microplasma excitation temperature in a pulsed microwave discharge
Jeffrey Hopwood, Shabnam Monfared, Alan Hoskinson
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Thursday, October 3, 2013
4:15PM - 4:30PM
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QR1.00004: Harmonic Generation by Microwave-frequency Microplasma
Stephen Parsons, Alan Hoskinson, Jeffrey Hopwood
Preview Abstract |
Thursday, October 3, 2013
4:30PM - 4:45PM
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QR1.00005: Microwave-driven plasmas in Hollow-Core Photonic Crystal Fibres
L.L. Alves, O. Leroy, C. Boisse-Laporte, P. Leprince, B. Debord, F. Gerome, R. Jamier, F. Benabid
Preview Abstract |
Session QR2: Capacitively Coupled Plasmas II
Chair: Ikuo Sawada, Tokyo Electron U.S.
Room: Ballroom II
Thursday, October 3, 2013
3:30PM - 4:00PM
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QR2.00001: Electron heating in capacitively coupled plasmas revisited: single and multi-frequency discharges
Invited Speaker:
Trevor Lafleur
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Thursday, October 3, 2013
4:00PM - 4:15PM
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QR2.00002: Electron heating and control of ion properties in capacitive discharges driven by customized voltage waveforms
Julian Schulze, Aranka Derzsi, Ihor Korolov, Edmund Schuengel, Zoltan Donko
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Thursday, October 3, 2013
4:15PM - 4:30PM
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QR2.00003: Student Award Finalist - The role of surface properties in the dynamics of radio-frequency plasma sheaths: measurements and simulations
Arthur Greb, Andrew Gibson, Kari Niemi, Deborah O'Connell, Timo Gans
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Thursday, October 3, 2013
4:30PM - 4:45PM
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QR2.00004: An Analytical Model for the Radio-Frequency Sheath
Uwe Czarnetzki
Preview Abstract |
Thursday, October 3, 2013
4:45PM - 5:00PM
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QR2.00005: Transient plasma parameters in pulsed RF CCP discharges
Theresa Kummerer, David Coumou, Steven Shannon
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Session QR3: Magnetically Enhanced Plasmas
Chair: Ben Longmier, University of Michigan
Room: Nassau Room
Thursday, October 3, 2013
3:30PM - 4:00PM
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QR3.00001: Plasma regimes in high power pulsed magnetron sputtering
Invited Speaker:
Teresa de los Arcos
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Thursday, October 3, 2013
4:00PM - 4:15PM
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QR3.00002: Sensitivity analysis via kinetic global modeling of rotating spokes in HiPIMS
Sara Gallian, Jan Trieschmann, Thomas Mussenbrock, William N.G. Hitchon, Ralf Peter Brinkmann
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Thursday, October 3, 2013
4:15PM - 4:30PM
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QR3.00003: Kinetic simulation of neutral particle transport in sputtering processes
Jan Trieschmann, Sara Gallian, Ralf Peter Brinkmann, Thomas Mussenbrock, Stefan Ries, Nikita Bibinov, Peter Awakowicz
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Thursday, October 3, 2013
4:30PM - 4:45PM
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QR3.00004: Effect of anomalous electron cross-field transport on electron energy distribution function in a DC-RF magnetized plasma discharge
Yevgeny Raitses, Vincent Donnelly, Igor Kaganovich, Valery Godyak
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Thursday, October 3, 2013
4:45PM - 5:00PM
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QR3.00005: Proof of principle experiments for helicon discharges in hydrogen
Stefan Briefi, Ursel Fantz
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