66th Annual Gaseous Electronics Conference
Volume 58, Number 8
Monday–Friday, September 30–October 4 2013;
Princeton, New Jersey
Session Index
Session PR2: Capacitively Coupled Plasmas I
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Show Abstracts |
Chair: Kallol Bera, Applied Materials Inc.
Room: Ballroom II
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Thursday, October 3, 2013
1:30PM - 1:45PM
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PR2.00001: IEDF Skew Control Using Phase Locked Dual Frequency RF Drive
Hamilton Clark, Theresa Kummerer, David Coumou, Steven Shannon
Preview Abstract |
Thursday, October 3, 2013
1:45PM - 2:00PM
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PR2.00002: Evaluation of Equivalent Circuit Models for Plasma Bulk Characterization by Comparing IEDF Predictions with those of a Spatially Resolved CCP Model
Schabnam Naggary, Mohammed Shihab, Frank Atteln, Mustafa Megahed, Ralf Peter Brinkmann
Preview Abstract |
Thursday, October 3, 2013
2:00PM - 2:15PM
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PR2.00003: A particle-in-cell/Monte Carlo simulation of a capacitively coupled chlorine discharge
Jon T. Gudmundsson, Shuo Huang
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Thursday, October 3, 2013
2:15PM - 2:30PM
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PR2.00004: Numerical Confirmation of the Feasibility to Generate Uniform Large-Area VHF Plasmas by Launching a Travelling Wave
Hsin-Liang Chen, Yen-Cheng Tu, Cheng-Chang Hsieh, Wen-Fa Tsai, Chi-Fong Ai, Keh-Chyang Leou
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Thursday, October 3, 2013
2:30PM - 2:45PM
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PR2.00005: Higher harmonic waves and a center-peaked plasma density profile in VHF-CCP reactors
Ikuo Sawada, Barton Lane, Peter Ventzek, Rochan Upadhay, Laxminarayan Raja
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Thursday, October 3, 2013
2:45PM - 3:00PM
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PR2.00006: Observation of an abrupt electron heating mode transition in capacitive single radio frequency discharges
Sebastian Wilczek, Jan Trieschmann, Julian Schulze, Ralf Peter Brinkmann, Thomas Mussenbrock, Aranka Derzsi, Ihor Korolov, Zoltan Donk\'o
Preview Abstract |
