Bulletin of the American Physical Society
66th Annual Gaseous Electronics Conference
Volume 58, Number 8
Monday–Friday, September 30–October 4 2013; Princeton, New Jersey
Session MR1: Poster Session III (8:00-9:30AM)
8:00 AM,
Thursday, October 3, 2013
Room: Ballroom Foyer
Abstract ID: BAPS.2013.GEC.MR1.45
Abstract: MR1.00045 : Cluster incorporation during amplitude modulated VHF discharge silane plasmas*
Preview Abstract Abstract
Authors:
Susumu Toko
(Kyushu University)
Yeonwon Kim
(Kyushu University)
Yuji Hashimoto
(Kyushu University)
Yoshinori Kanemitu
(Kyushu University)
Hyunwoong Seo
(Kyushu University)
Giichiro Uchida
(Kyushu University)
Kunihiro Kamataki
(Kyushu University)
Naho Itagaki
(Kyushu University)
Kazunori Koga
(Kyushu University)
Masaharu Shiratani
(Kyushu University)
*Work supported by NEDO and PVTEC.
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2013.GEC.MR1.45
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