Bulletin of the American Physical Society
66th Annual Gaseous Electronics Conference
Volume 58, Number 8
Monday–Friday, September 30–October 4 2013; Princeton, New Jersey
Session QR2: Capacitively Coupled Plasmas II
3:30 PM–5:00 PM,
Thursday, October 3, 2013
Room: Ballroom II
Chair: Ikuo Sawada, Tokyo Electron U.S.
Abstract ID: BAPS.2013.GEC.QR2.3
Abstract: QR2.00003 : Student Award Finalist - The role of surface properties in the dynamics of radio-frequency plasma sheaths: measurements and simulations
4:15 PM–4:30 PM
Preview Abstract Abstract
Authors:
Arthur Greb
(York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, UK)
Andrew Gibson
(Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, UK)
Kari Niemi
(York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, UK)
Deborah O'Connell
(York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, UK)
Timo Gans
(York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, UK)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2013.GEC.QR2.3
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