Bulletin of the American Physical Society
66th Annual Gaseous Electronics Conference
Volume 58, Number 8
Monday–Friday, September 30–October 4 2013; Princeton, New Jersey
Session MR1: Poster Session III (8:00-9:30AM)
8:00 AM,
Thursday, October 3, 2013
Room: Ballroom Foyer
Abstract ID: BAPS.2013.GEC.MR1.50
Abstract: MR1.00050 : Ar/N2 Magnetron Sputtering Discharges to Control Growth of Transparent Conducting Oxide Films
Preview Abstract
Abstract
Authors:
Koichiro Oshikawa
(Kyushu University)
Iping Suhariadi
(Kyushu University)
Daisuke Yamashita
(Kyushu University)
Hyunwoong Seo
(Kyushu University)
Kunihiro Kamataki
(Kyushu University)
Giichiro Uchida
(Kyushu University)
Kazunori Koga
(Kyushu University)
Masaharu Shiratani
(Kyushu University)
Naho Itagaki
(Kyushu University)
To cite this abstract, use the following reference: http://meetings.aps.org/link/BAPS.2013.GEC.MR1.50
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