65th Annual Gaseous Electronics Conference
Volume 57, Number 8
Monday–Friday, October 22–26, 2012;
Austin, Texas
Session Index
Session CT1: Plasma Sheaths I
Chair: Peter Ventzek, Tokyo Electron Limited
Room: Amphitheatre 204
Tuesday, October 23, 2012
8:00AM - 8:30AM
|
|
CT1.00001: Plasma-Sheath Revisited
Invited Speaker:
Natalia Sternberg
Preview Abstract |
Tuesday, October 23, 2012
8:30AM - 8:45AM
|
|
CT1.00002: Dust particle charge and screening in the collisional RF plasma sheath
Job Beckers, Dirk Trienekens, Gerrit Kroesen
Preview Abstract |
Tuesday, October 23, 2012
8:45AM - 9:00AM
|
|
CT1.00003: Fast, Kinetically self-consistent simulation of RF modulated plasma boundary sheaths
Mohammed Shihab, Ralf Peter Brinkmann
Preview Abstract |
Tuesday, October 23, 2012
9:00AM - 9:15AM
|
|
CT1.00004: Investigation of Presheath and Sheath Using a Full-Vlasov Simulation
Kentaro Hara, Iain Boyd, Vladimir Kolobov
Preview Abstract |
Tuesday, October 23, 2012
9:15AM - 9:30AM
|
|
CT1.00005: A sheath model for arbitrary radiofrequency waveforms
M.M. Turner, Pascal Chabert
Preview Abstract |
Session CT2: Plasma Surface Interactions
Chair: Vince Donnelly, University of Houston
Room: Classroom 203
Tuesday, October 23, 2012
8:00AM - 8:15AM
|
|
CT2.00001: MD simulations of hydrogen plasma interaction with graphene surfaces
David Graves, Emilie Despiau-Pujo, Alexandra Davydova, Gilles Cunge, Laurence Magaud
Preview Abstract |
Tuesday, October 23, 2012
8:15AM - 8:30AM
|
|
CT2.00002: Atomic Hydrogen Measurements in a Fusion-Relevant Plasma
Cameron Samuell, Cormac Corr
Preview Abstract |
Tuesday, October 23, 2012
8:30AM - 8:45AM
|
|
CT2.00003: Comparison of CF$_{4}$, CHF$_{3}$ and CH$_{2}$F$_{2}$ plasmas used for wafer processing
Stefan Tinck, Alexey Milenin, Annemie Bogaerts
Preview Abstract |
Tuesday, October 23, 2012
8:45AM - 9:00AM
|
|
CT2.00004: Effect of cathode cooling efficiency and oxygen plasma gas pressure on the hafnium cathode wall temperature
Koustubh Ashtekar, Gregory Diehl, John Hamer
Preview Abstract |
Tuesday, October 23, 2012
9:00AM - 9:15AM
|
|
CT2.00005: Ultra low-k dielectrics damage under VUV and EUV radiation
Sergey Zyryanov, Oleg Braginsky, Alexander Kovalev, Dmitry Lopaev, Yury Mankelevich, Tatyana Rakhimova, Alexander Rakhimov, Anna Vasilieva, Mikhail Baklanov
Preview Abstract |
Tuesday, October 23, 2012
9:15AM - 9:30AM
|
|
CT2.00006: Plasma surface interaction in hot filament cathode arc discharge used to nitride steel substrates
R.P. Dahiya, O. Singh, V. Aggarwal, H.K. Malik, Nisha Kumari
Preview Abstract |
Session CT4: Microdischarges I
Chair: Larry Overzet, University of Texas at Dallas
Room: Salon DE
Tuesday, October 23, 2012
8:00AM - 8:15AM
|
|
CT4.00001: Characterisation of a rf micro hollow cathode discharge and its interactions with nearest neighbours
Sam Dixon, Rod Boswell, Christine Charles, John Holland, Wes Cox
Preview Abstract |
Tuesday, October 23, 2012
8:15AM - 8:30AM
|
|
CT4.00002: Microhollow Cathode Sustained Discharge with Split Third Electrodes
Sharmin Sultana, Jichul Shin
Preview Abstract |
Tuesday, October 23, 2012
8:30AM - 9:00AM
|
|
CT4.00003: Impact of gas heating on an rf-plasma structure in a microcell at high pressure
Invited Speaker:
Toshiaki Makabe
Preview Abstract |
Tuesday, October 23, 2012
9:00AM - 9:15AM
|
|
CT4.00004: Particle-in-Cell Simulations of ns-pulse and RF driven microdischarges
Alexandre Likhanskii, Sergey Macheret
Preview Abstract |
Tuesday, October 23, 2012
9:15AM - 9:30AM
|
|
CT4.00005: Microwave-Excited Microplasma Thrusters Using Surface Wave and Electron Cyclotron Resonance Discharges
Daisuke Mori, Tetsuo Kawanabe, Yoshinori Takao, Koji Eriguchi, Kouichi Ono
Preview Abstract |
