65th Annual Gaseous Electronics Conference
Volume 57, Number 8
Monday–Friday, October 22–26, 2012;
Austin, Texas
Session Index
Session UF4: Plasma Deposition and Photovoltaic Applications
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Chair: Masaharu Shiratani, Kyushu University
Room: Salon DE
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Friday, October 26, 2012
9:00AM - 9:30AM
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UF4.00001: Investigation of high power impulse magnetron sputtering (HIPIMS) discharge using fast ICCD camera
Invited Speaker:
Ante Hecimovic
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Friday, October 26, 2012
9:30AM - 9:45AM
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UF4.00002: Reactive high power impulse magnetron sputtering
J.T. Gudmundsson, F. Magnus, T.K. Tryggvason, O.B. Sveinsson, S. Olafsson
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Friday, October 26, 2012
9:45AM - 10:00AM
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UF4.00003: Control Capabilities of Reactive Sputter Deposition Process via ICPs Driven by Low-Inductance Antenna for Large-Area Formation of Thin Film Devices
Yuichi Setsuhara, Kosuke Takenaka, Akinori Ebe
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Friday, October 26, 2012
10:00AM - 10:15AM
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UF4.00004: Source gas depletion in narrow metal tube during internal DLC coating with microwave-excited high-density near plasma
Ryosuke Matsui, Hiroyuki Kosaka, Noritsugu Umehara
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Friday, October 26, 2012
10:15AM - 10:30AM
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UF4.00005: Fabrication of graphene-based films using remote plasma CVD
Mineo Hiramatsu, Ryosuke Tsukada, Yohei Kashima, Masateru Naito, Hiroki Kondo, Masaru Hori
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Friday, October 26, 2012
10:30AM - 10:45AM
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UF4.00006: A plasma-enhanced close-spacing sublimation (PECSS) device for photovoltaic thin-film modification
Garrett Metz, Len Mahoney, John Williams, Drew Swanson, Walajabad Sampath
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Friday, October 26, 2012
10:45AM - 11:00AM
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UF4.00007: Investigations of capacitively coupled radio frequency hydrogen and hydrogen/silane discharges
Sebastian Mohr, Edmund Sch\"ungel, Julian Schulze, Uwe Czarnetzki
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