65th Annual Gaseous Electronics Conference
Volume 57, Number 8
Monday–Friday, October 22–26, 2012;
Austin, Texas
Session Index
Session FT2: Plasma Modeling and Simulations I
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Chair: Haruaki Akashi, National Defense Academy, Japan
Room: Classroom 203
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Tuesday, October 23, 2012
3:30PM - 4:00PM
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FT2.00001: Simulations of Plasma Sources for Semiconductor Device Manufacturing
Invited Speaker:
Peter Ventzek
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Tuesday, October 23, 2012
4:00PM - 4:15PM
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FT2.00002: ABSTRACT WITHDRAWN
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Tuesday, October 23, 2012
4:15PM - 4:30PM
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FT2.00003: The effect of frequency-dependent electron swarm parameters on fluid modeling of high-frequency CCP discharges
Rochan Upadhyay, Shankar Mahadevan, Ikuo Sawada, Mirko Vukovic, Peter Ventzek, Laxminarayan Raja
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Tuesday, October 23, 2012
4:30PM - 4:45PM
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FT2.00004: Two-Dimensional (z-$\theta$) Hybrid Fluid-PIC Simulation of Enhanced Cross-field Electron Transport in an Annular \textit{E}$\times$\textit{B} Discharge
Cheryl Lam, Eduardo Fernandez, Mark Cappelli
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Tuesday, October 23, 2012
4:45PM - 5:00PM
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FT2.00005: A new approach for the determination of electron transport coefficients
Markus M. Becker, Detlef Loffhagen
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Tuesday, October 23, 2012
5:00PM - 5:15PM
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FT2.00006: Comparison of a Global Model to Semi-Kinetic Fluid Simulations for Atmospheric Pressure Radio- Frequency Capacitive Discharges
Kari Niemi, Deborah O'Connell, Timo Gans
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Tuesday, October 23, 2012
5:15PM - 5:30PM
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FT2.00007: Analytical Model for the Microwave Driven Double ICP Plasma Jet
Ali Arshadi, Denis Eremin, Thomas Mussenbrock, Ralf Peter Brinkmann, Peter Awakowicz, Horia-Eugen Porteanu, Roland Gesche, Klaus Wandel
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